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Physics of Semiconductor Technologies and Devices

4 ECTS credits
110 h study time

Offer 1 with catalog number 4020328FNR for all students in the 2nd semester at a (F) Master - specialised level.

Information about this course is applicable on academic year 2017-2018.

2nd semester
Enrollment based on exam contract
Grading method

Grading (scale from 0 to 20)

Can retake in second session
Taught in
Partnership agreement
  • Under interuniversity agreement for degree program
Faculty of Engineering
Responsible organisation
Electronics and Informatics
Educational Team:
Activities and contact hours
  • 18 contact hours Lecture
  • 18 contact hours Seminar, Exercises or Practicals
Course content


1. Overview of the important technological steps in the manufacturing of micro- and nano-devices.

2. Detailed treatment of such steps:

- Methods to obtain high purity materials.

- Mono crystalline growth

- Doping of crystals

- Manufacturing of substrates

- Electron beam systems and the manufacturing of masks and photolithography

- Dimensioning devices (geometrical factors)

- Oxidation

- Epitaxy techniques (CVD, MBE and MOCVD)

- Surface doping methods: diffusion and ion implantation

- Atomic layer deposition

- Interconnects: metallization, dielectrics deposition for wave guiding, silicidation

- Etching (chemical, physical methods)

- Laser ablation

- Fabrication of micro lenses

3. Physics and technology of some basic semiconductor optoelectronic devices:

- detector

-solar cell

- LED (including OLED)

-imaging sensors: CCD and CMOS

4. Practical sessions: Simulation of technological processes (TCAD)

Course material
  • Course text (Required): Physics of Semiconductor Technologies and Devices, R. Vounckx
  • Handbook (Recommended): Understanding semiconductor devices, Sima Dimitrjiev, Oxford University Press 2000, 0-19-513186-X, 2000
  • Handbook (Recommended): An introduction to semiconductor microtechnology, D. V. Morgan and K. Board, John Wiley, 1990
  • Handbook (Recommended): Introduction to Semiconductor Manufacturing Technology, Hong Xiao, Prentice Hall, 2001
  • Handbook (Recommended): Fundamentals of Semiconductor Fabrication, Gary S. May and Simon S. Sze, John Wiley, 0-471-23279-3, 2004
  • Handbook (Recommended): Principles of solar cells, LEDs and diodes, Adrian Kitai, John Wiley, 9781444318340, 2011
Additional info

N/A ....

Programme Objectives

General competencies


To have a sound knowledge of the physics of technological processes that are being used to produce electronic, optoelectronic and photonic solid state devices. To acquire a basic knowledge of the physics of semiconductor optoelectronic devices.  To be able to bring together technological steps or processes into a technology to produce a device with certain properties.


The final grade is composed based on the following categories:

  • Other Exam determines 100% of the final mark.

Within the Other Exam category, the following assignments need to be completed:

exam with a relative weight of 1 which comprises 100% of the final mark.

Note: 1. Oral exam about the lectures: 2/3 of the total score:
An oral closed book examination concerning the physics of technology and processing. Attention is not only given to the reproduction of the theoretical content, but also and predominantly to the deeper understanding via e.g. a confrontation with novel techniques, devices and technologies. The student is in principle asked two main questions: one quantitative and one qualitative. Especially the second type allows probing for understanding and feeling. The student is offered to prepare his answers first on paper; then follows the oral examination and a discussion about related topics.

2.Written report during the lab sessions + oral questioning about the report: 1/3 of the total score:
A written report about the work performed during the practical sessions, supplemented by an oral examination about the contents of the report.

Additional info with regard to grading

N/A ...